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Machine learning based recursive partitioning for simplifying OPC model building complexity
dc.contributor.author | Oak, Apoorva | |
dc.contributor.author | Hwang, Soobin | |
dc.contributor.author | Chen, Ruoxia | |
dc.contributor.author | Kang, Shinill | |
dc.contributor.author | Kim, Ryan Ryoung han | |
dc.date.accessioned | 2021-11-02T15:59:40Z | |
dc.date.available | 2021-11-02T15:59:40Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000672647800016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37770 | |
dc.source | WOS | |
dc.title | Machine learning based recursive partitioning for simplifying OPC model building complexity | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Oak, Apoorva | |
dc.contributor.imecauthor | Kim, Ryan Ryoung han | |
dc.contributor.orcidimec | Oak, Apoorva::0000-0002-0926-848X | |
dc.identifier.doi | 10.1117/12.2584704 | |
dc.identifier.eisbn | 978-1-5106-4062-7 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Design-Process-Technology Co-optimization XV | |
dc.source.conferencedate | FEB 22-26, 2021 | |
dc.source.volume | 11614 | |
imec.availability | Under review |
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