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dc.contributor.authorOak, Apoorva
dc.contributor.authorHwang, Soobin
dc.contributor.authorChen, Ruoxia
dc.contributor.authorKang, Shinill
dc.contributor.authorKim, Ryan Ryoung han
dc.date.accessioned2021-11-02T15:59:40Z
dc.date.available2021-11-02T15:59:40Z
dc.date.issued2021
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000672647800016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37770
dc.sourceWOS
dc.titleMachine learning based recursive partitioning for simplifying OPC model building complexity
dc.typeProceedings paper
dc.contributor.imecauthorOak, Apoorva
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.orcidimecOak, Apoorva::0000-0002-0926-848X
dc.identifier.doi10.1117/12.2584704
dc.identifier.eisbn978-1-5106-4062-7
dc.source.numberofpages8
dc.source.peerreviewyes
dc.source.conferenceConference on Design-Process-Technology Co-optimization XV
dc.source.conferencedateFEB 22-26, 2021
dc.source.volume11614
imec.availabilityUnder review


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