dc.contributor.author | Hon, K. | |
dc.contributor.author | Couet, Sebastien | |
dc.contributor.author | Vudya Sethu, Kiran Kumar | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.date.accessioned | 2021-12-15T11:23:09Z | |
dc.date.available | 2021-11-02T15:59:57Z | |
dc.date.available | 2021-12-15T11:23:09Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 0040-6090 | |
dc.identifier.other | WOS:000672538500009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/37800.2 | |
dc.source | WOS | |
dc.title | Effect of nitrogen doping on the structure of metastable /3-W on SiO2 | |
dc.type | Journal article | |
dc.contributor.imecauthor | Couet, Sebastien | |
dc.contributor.imecauthor | Vudya Sethu, Kiran Kumar | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.imecauthor | Couet, Sebastien | |
dc.contributor.imecauthor | Vudya Sethu, Kiran Kumar | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.orcidimec | Couet, Sebastien::0000-0001-6436-9593 | |
dc.identifier.doi | 10.1016/j.tsf.2021.138795 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.journal | THIN SOLID FILMS | |
dc.source.issue | na | |
dc.source.volume | 732 | |
imec.availability | Published - imec | |