dc.contributor.author | Davydova, Natalia | |
dc.contributor.author | Liu, Fei | |
dc.contributor.author | Benk, Markus | |
dc.contributor.author | van Setten, Eelco | |
dc.contributor.author | Bottiglieri, Gerardo | |
dc.contributor.author | van Oosten, Anton | |
dc.contributor.author | McNamara, John | |
dc.contributor.author | Wiaux, Vincent | |
dc.contributor.author | Franke, Joern-Holger | |
dc.contributor.author | Goldberg, Kenneth | |
dc.contributor.author | Nam, D. S. | |
dc.contributor.author | Zekry, Joseph | |
dc.contributor.author | Naulleau, Patrick | |
dc.contributor.author | Fliervoet, Timon | |
dc.contributor.author | Carpaij, Rene | |
dc.date.accessioned | 2022-01-28T08:14:34Z | |
dc.date.available | 2021-11-02T16:03:47Z | |
dc.date.available | 2022-01-28T08:14:34Z | |
dc.date.issued | 2020 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000632585900013 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38087.2 | |
dc.source | WOS | |
dc.title | Experimental verification of high-NA imaging simulations using SHARP | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Wiaux, Vincent | |
dc.contributor.imecauthor | Franke, Joern-Holger | |
dc.contributor.orcidimec | Franke, Joern-Holger::0000-0002-3571-1633 | |
dc.identifier.doi | 10.1117/12.2572846 | |
dc.identifier.eisbn | 978-1-5106-3843-3 | |
dc.source.numberofpages | 15 | |
dc.source.peerreview | yes | |
dc.source.conference | Conference on Extreme Ultraviolet Lithography | |
dc.source.conferencedate | SEP 21-25, 2020 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 11517 | |
imec.availability | Published - imec | |