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dc.contributor.authorDavydova, Natalia
dc.contributor.authorLiu, Fei
dc.contributor.authorBenk, Markus
dc.contributor.authorvan Setten, Eelco
dc.contributor.authorBottiglieri, Gerardo
dc.contributor.authorvan Oosten, Anton
dc.contributor.authorMcNamara, John
dc.contributor.authorWiaux, Vincent
dc.contributor.authorFranke, Joern-Holger
dc.contributor.authorGoldberg, Kenneth
dc.contributor.authorNam, D. S.
dc.contributor.authorZekry, Joseph
dc.contributor.authorNaulleau, Patrick
dc.contributor.authorFliervoet, Timon
dc.contributor.authorCarpaij, Rene
dc.date.accessioned2022-01-28T08:14:34Z
dc.date.available2021-11-02T16:03:47Z
dc.date.available2022-01-28T08:14:34Z
dc.date.issued2020
dc.identifier.issn0277-786X
dc.identifier.otherWOS:000632585900013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38087.2
dc.sourceWOS
dc.titleExperimental verification of high-NA imaging simulations using SHARP
dc.typeProceedings paper
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorFranke, Joern-Holger
dc.contributor.orcidimecFranke, Joern-Holger::0000-0002-3571-1633
dc.identifier.doi10.1117/12.2572846
dc.identifier.eisbn978-1-5106-3843-3
dc.source.numberofpages15
dc.source.peerreviewyes
dc.source.conferenceConference on Extreme Ultraviolet Lithography
dc.source.conferencedateSEP 21-25, 2020
dc.source.conferencelocationVirtual
dc.source.journalProceedings of SPIE
dc.source.volume11517
imec.availabilityPublished - imec


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