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Blue-violet emission of silicon carbonitride thin films prepared by sputtering and annealing treatment
dc.contributor.author | Li, Qiang | |
dc.contributor.author | Chen, Cheng | |
dc.contributor.author | Xu, Manzhang | |
dc.contributor.author | Wang, Yingnan | |
dc.contributor.author | Wang, Xuewen | |
dc.contributor.author | Zhang, Zhiyong | |
dc.contributor.author | Zhao, Wu | |
dc.contributor.author | Stiens, Johan | |
dc.date.accessioned | 2021-11-02T16:04:17Z | |
dc.date.available | 2021-11-02T16:04:17Z | |
dc.date.issued | 2021-APR 30 | |
dc.identifier.issn | 0169-4332 | |
dc.identifier.other | WOS:000620362400007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38126 | |
dc.source | WOS | |
dc.title | Blue-violet emission of silicon carbonitride thin films prepared by sputtering and annealing treatment | |
dc.type | Journal article | |
dc.contributor.imecauthor | Stiens, Johan | |
dc.contributor.orcidext | Chen, Cheng::0000-0002-3278-8707 | |
dc.identifier.doi | 10.1016/j.apsusc.2021.149121 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.journal | APPLIED SURFACE SCIENCE | |
dc.source.volume | 546 | |
imec.availability | Under review |
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