dc.contributor.author | Penaranda, Juan Santo Domingo | |
dc.contributor.author | Nisula, Mikko | |
dc.contributor.author | Vandenbroucke, Sofie | |
dc.contributor.author | Minjauw, Matthias M. | |
dc.contributor.author | Li, Jin | |
dc.contributor.author | Werbrouck, Andreas | |
dc.contributor.author | Keukelier, Jonas | |
dc.contributor.author | Pitillas Martinez, Andrea I. | |
dc.contributor.author | Dendooven, Jolien | |
dc.contributor.author | Detavernier, Christophe | |
dc.date.accessioned | 2022-03-03T11:07:59Z | |
dc.date.available | 2021-11-02T16:04:21Z | |
dc.date.available | 2022-03-03T11:07:59Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 1477-9226 | |
dc.identifier.other | WOS:000613897700007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38134.2 | |
dc.source | WOS | |
dc.title | Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vandenbroucke, Sofie | |
dc.contributor.orcidext | Penaranda, Juan Santo Domingo::0000-0002-1219-5066 | |
dc.contributor.orcidext | Nisula, Mikko::0000-0001-5572-8574 | |
dc.contributor.orcidext | Li, Jin::0000-0003-1099-6289 | |
dc.contributor.orcidext | Keukelier, Jonas::0000-0001-9824-414X | |
dc.contributor.orcidext | Pitillas Martinez, Andrea I.::0000-0002-7010-3836 | |
dc.contributor.orcidext | Dendooven, Jolien::0000-0002-2385-3693 | |
dc.contributor.orcidimec | Vandenbroucke, Sofie::0000-0002-2831-3696 | |
dc.identifier.doi | 10.1039/d0dt03896b | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.journal | DALTON TRANSACTIONS | |
dc.identifier.pmid | MEDLINE:33351866 | |
dc.source.issue | 4 | |
dc.source.volume | 50 | |
imec.availability | Published - imec | |