Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification

Publication:

2021

Journal article

Author(s)

Penaranda, Juan Santo Domingo

;

Nisula, Mikko

;

;

Minjauw, Matthias M.

;

Li, Jin

;

Werbrouck, Andreas

;

Keukelier, Jonas

;

Pitillas Martinez, Andrea I.

;

Dendooven, Jolien

;

Detavernier, Christophe

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Acq. date: 2026-10-13