Publication:

Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification

Date

2021
Journal article
https://doi.org/10.1039/d0dt03896b
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dc.contributor.authorPenaranda, Juan Santo Domingo
dc.contributor.authorNisula, Mikko
dc.contributor.authorVandenbroucke, Sofie
dc.contributor.authorMinjauw, Matthias M.
dc.contributor.authorLi, Jin
dc.contributor.authorWerbrouck, Andreas
dc.contributor.authorKeukelier, Jonas
dc.contributor.authorPitillas Martinez, Andrea I.
dc.contributor.authorDendooven, Jolien
dc.contributor.authorDetavernier, Christophe
dc.contributor.imecauthorVandenbroucke, Sofie
dc.contributor.orcidextPenaranda, Juan Santo Domingo::0000-0002-1219-5066
dc.contributor.orcidextNisula, Mikko::0000-0001-5572-8574
dc.contributor.orcidextLi, Jin::0000-0003-1099-6289
dc.contributor.orcidextKeukelier, Jonas::0000-0001-9824-414X
dc.contributor.orcidextPitillas Martinez, Andrea I.::0000-0002-7010-3836
dc.contributor.orcidextDendooven, Jolien::0000-0002-2385-3693
dc.contributor.orcidimecVandenbroucke, Sofie::0000-0002-2831-3696
dc.date.accessioned2022-03-03T11:07:59Z
dc.date.available2021-11-02T16:04:21Z
dc.date.available2022-03-03T11:07:59Z
dc.date.issued2021
dc.identifier.doi10.1039/d0dt03896b
dc.identifier.issn1477-9226
dc.identifier.pmidMEDLINE:33351866
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38134
dc.publisherROYAL SOC CHEMISTRY
dc.source.issue4
dc.source.journalDALTON TRANSACTIONS
dc.source.numberofpages10
dc.source.volume50
dc.title

Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densification

dc.typeJournal article
dspace.entity.typePublication
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