dc.contributor.author | Tanksalvala, Michael | |
dc.contributor.author | Porter, Christina L. | |
dc.contributor.author | Esashi, Yuka | |
dc.contributor.author | Wang, Bin | |
dc.contributor.author | Jenkins, Nicholas W. | |
dc.contributor.author | Zhang, Zhe | |
dc.contributor.author | Miley, Galen P. | |
dc.contributor.author | Knobloch, Joshua L. | |
dc.contributor.author | McBennett, Brendan | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Yazdi, Sadegh | |
dc.contributor.author | Zhou, Jihan | |
dc.contributor.author | Jacobs, Matthew N. | |
dc.contributor.author | Bevis, Charles S. | |
dc.contributor.author | Karl, Robert M., Jr. | |
dc.contributor.author | Johnsen, Peter | |
dc.contributor.author | Ren, David | |
dc.contributor.author | Waller, Laura | |
dc.contributor.author | Adams, Daniel E. | |
dc.contributor.author | Cousin, Seth L. | |
dc.contributor.author | Liao, Chen-Ting | |
dc.contributor.author | Miao, Jianwei | |
dc.contributor.author | Gerrity, Michael | |
dc.contributor.author | Kapteyn, Henry C. | |
dc.contributor.author | Murnane, Margaret M. | |
dc.date.accessioned | 2022-04-25T10:13:23Z | |
dc.date.available | 2021-11-02T16:04:30Z | |
dc.date.available | 2022-04-08T12:26:10Z | |
dc.date.available | 2022-04-25T10:13:23Z | |
dc.date.issued | 2021-01-27 | |
dc.identifier.issn | 2375-2548 | |
dc.identifier.other | WOS:000614004600029 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38142.3 | |
dc.source | WOS | |
dc.title | Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry | |
dc.type | Journal article | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidext | Porter, Christina L.::0000-0002-4476-9749 | |
dc.contributor.orcidext | Esashi, Yuka::0000-0002-6749-5496 | |
dc.contributor.orcidext | Jenkins, Nicholas W.::0000-0001-5725-0658 | |
dc.contributor.orcidext | Knobloch, Joshua L.::0000-0002-4086-3746 | |
dc.contributor.orcidext | Bevis, Charles S.::0000-0002-8671-0681 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.identifier.doi | 10.1126/sciadv.abd9667 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.beginpage | eabd9667 | |
dc.source.journal | SCIENCE ADVANCES | |
dc.identifier.pmid | MEDLINE:33571123 | |
dc.source.issue | 5 | |
dc.source.volume | 7 | |
imec.availability | Published - open access | |