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dc.contributor.authorEdinger, Pierre
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorQuack, Niels
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBogaerts, Wim
dc.contributor.authorGylfason, Kristinn B.
dc.date.accessioned2021-12-15T09:11:17Z
dc.date.available2021-11-02T16:04:46Z
dc.date.available2021-12-15T09:11:17Z
dc.date.issued2020
dc.identifier.issn2160-9020
dc.identifier.otherWOS:000612090002011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38160.2
dc.sourceWOS
dc.titleCompact low loss MEMS phase shifters for scalable field-programmable silicon photonics
dc.typeProceedings paper
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.identifier.eisbn978-1-943580-76-7
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceConference on Lasers and Electro-Optics (CLEO)
dc.source.conferencedateMAY 10-15, 2020
dc.source.conferencelocationSan Jose
dc.source.journalna
imec.availabilityPublished - imec


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