Show simple item record

Metal reliability mechanisms in Ruthenium interconnects

dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorStucchi, Michele
dc.contributor.authorGupta, Anshul
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorLariviere, Stephane
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-11-22T09:26:00Z
dc.date.available2021-11-02T16:05:23Z
dc.date.available2021-11-22T09:26:00Z
dc.date.issued2020
dc.identifier.issn1541-7026
dc.identifier.otherWOS:000612717200091
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38211.2
dc.sourceWOS
dc.titleMetal reliability mechanisms in Ruthenium interconnects
dc.typeProceedings paper
dc.contributor.imecauthorPedreira, O. Varela
dc.contributor.imecauthorStucchi, M.
dc.contributor.imecauthorGupta, A.
dc.contributor.imecauthorGonzalez, V. Vega
dc.contributor.imecauthorvan der Veen, M.
dc.contributor.imecauthorLariviere, S.
dc.contributor.imecauthorWilson, C. J.
dc.contributor.imecauthorTokei, Zs
dc.contributor.imecauthorCroes, K.
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorLariviere, Stephane
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.identifier.eisbn978-1-7281-3199-3
dc.source.numberofpages7
dc.source.peerreviewyes
dc.source.conferenceIEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedateAPR 28-MAY 30, 2020
dc.source.conferencelocationDallas, TX, USA
dc.source.journalna
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
220.500.12860/38211.2*2021-11-22T09:20:47Zvalidation by library/open access desk
120.500.12860/382112021-11-02T16:05:23Z

*Selected version