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Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
dc.contributor.author | Rouzbahani, Rozita | |
dc.contributor.author | Nicley, Shannon S. | |
dc.contributor.author | Vanpoucke, Danny E. P. | |
dc.contributor.author | Lloret, Fernando | |
dc.contributor.author | Pobedinskas, Paulius | |
dc.contributor.author | Araujo, Daniel | |
dc.contributor.author | Haenen, Ken | |
dc.date.accessioned | 2021-11-02T16:07:03Z | |
dc.date.available | 2021-11-02T16:07:03Z | |
dc.date.issued | 2021-FEB | |
dc.identifier.issn | 0008-6223 | |
dc.identifier.other | WOS:000600206500014 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38331 | |
dc.source | WOS | |
dc.title | Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers | |
dc.type | Journal article | |
dc.contributor.imecauthor | Rouzbahani, Rozita | |
dc.contributor.imecauthor | Nicley, Shannon S. | |
dc.contributor.imecauthor | Vanpoucke, Danny E. P. | |
dc.contributor.imecauthor | Lloret, Fernando | |
dc.contributor.imecauthor | Pobedinskas, Paulius | |
dc.contributor.imecauthor | Haenen, Ken | |
dc.contributor.orcidext | Araujo, Daniel::0000-0001-7448-1474 | |
dc.contributor.orcidimec | Nicley, Shannon S.::0000-0002-5960-7873 | |
dc.contributor.orcidimec | Vanpoucke, Danny E. P.::0000-0001-5919-7336 | |
dc.contributor.orcidimec | Lloret, Fernando::0000-0002-6506-4027 | |
dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
dc.contributor.orcidimec | Pobedinskas, Paulius::0000-0001-8136-5172 | |
dc.identifier.doi | 10.1016/j.carbon.2020.10.061 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 463 | |
dc.source.endpage | 473 | |
dc.source.journal | CARBON | |
dc.source.volume | 172 | |
imec.availability | Under review |
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