Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm
dc.contributor.author | Saadeh, Qais | |
dc.contributor.author | Naujok, Philipp | |
dc.contributor.author | Philipsen, Vicky | |
dc.contributor.author | Hoenicke, Philipp | |
dc.contributor.author | Laubis, Christian | |
dc.contributor.author | Buchholz, Christian | |
dc.contributor.author | Andrle, Anna | |
dc.contributor.author | Stadelhoff, Christian | |
dc.contributor.author | Mentzel, Heiko | |
dc.contributor.author | Schoenstedt, Anja | |
dc.contributor.author | Soltwisch, Victor | |
dc.contributor.author | Scholze, Frank | |
dc.date.accessioned | 2022-04-21T08:14:07Z | |
dc.date.available | 2021-12-23T02:06:13Z | |
dc.date.available | 2022-03-28T11:53:08Z | |
dc.date.available | 2022-04-08T08:43:39Z | |
dc.date.available | 2022-04-21T08:14:07Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 1094-4087 | |
dc.identifier.other | WOS:000726115900025 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38655.4 | |
dc.source | WOS | |
dc.title | Time-frequency analysis assisted determination of ruthenium optical constants in the sub-EUV spectral range 8 nm-23.75 nm | |
dc.type | Journal article | |
dc.contributor.imecauthor | Philipsen, Vicky | |
dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
dc.identifier.doi | 10.1364/OE.426029 | |
dc.source.numberofpages | 21 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 40993 | |
dc.source.endpage | 41013 | |
dc.source.journal | OPTICS EXPRESS | |
dc.source.issue | 25 | |
dc.source.volume | 29 | |
imec.availability | Published - open access |