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A synchrotron radiation photoelectron spectroscopy study on atomic-scale wet etching of InAs (111)-A and (111)-B in acidic peroxide solutions: surface chemistry versus kinetics
dc.contributor.author | Abrenica, G. H. A. | |
dc.contributor.author | Lebedev, M., V | |
dc.contributor.author | Fingerle, M. | |
dc.contributor.author | Arnauts, S. | |
dc.contributor.author | Calvet, W. | |
dc.contributor.author | Mayer, T. | |
dc.contributor.author | de Gendt, S. | |
dc.contributor.author | van Dorp, D. H. | |
dc.date.accessioned | 2022-01-15T02:07:31Z | |
dc.date.available | 2022-01-15T02:07:31Z | |
dc.date.issued | 2022-MAR | |
dc.identifier.issn | 2468-5194 | |
dc.identifier.other | WOS:000740338100001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38745 | |
dc.source | WOS | |
dc.title | A synchrotron radiation photoelectron spectroscopy study on atomic-scale wet etching of InAs (111)-A and (111)-B in acidic peroxide solutions: surface chemistry versus kinetics | |
dc.type | Journal article | |
dc.contributor.imecauthor | Abrenica, G. H. A. | |
dc.contributor.imecauthor | Arnauts, S. | |
dc.contributor.imecauthor | de Gendt, S. | |
dc.contributor.imecauthor | van Dorp, D. H. | |
dc.identifier.doi | 10.1016/j.mtchem.2021.100728 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.source.journal | MATERIALS TODAY CHEMISTRY | |
dc.source.volume | 23 | |
imec.availability | Under review |
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