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dc.contributor.authorBender, Hugo
dc.contributor.authorVanhellemont, Jan
dc.date.accessioned2021-09-29T12:39:48Z
dc.date.available2021-09-29T12:39:48Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38
dc.sourceIIOimport
dc.titleOxygen in silicon
dc.typeBook chapter
dc.contributor.imecauthorBender, Hugo
dc.source.peerreviewno
dc.source.beginpage1637
dc.source.bookHandbook on Semiconductors. Vol. 3b: Materials, Properties and Preparations
dc.source.endpage1753
imec.availabilityPublished - imec
imec.internalnotesChapter 22


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