dc.contributor.author | Kandybka, Iryna | |
dc.contributor.author | Birant, Gizem | |
dc.contributor.author | de Wild, Jessica | |
dc.contributor.author | Buldu, Dilara Gokcen | |
dc.contributor.author | Kohl, Thierry | |
dc.contributor.author | Thiruvallur Eachambadi, Ragha | |
dc.contributor.author | Brammertz, Guy | |
dc.contributor.author | Manca, Jean, V | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Poortmans, Jef | |
dc.contributor.author | Vermang, Bart | |
dc.date.accessioned | 2022-02-23T09:02:55Z | |
dc.date.available | 2022-02-23T09:02:55Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 0022-3727 | |
dc.identifier.other | WOS:000631361600001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39031 | |
dc.source | WOS | |
dc.title | Novel cost-effective approach to produce nano-sized contact openings in an aluminum oxide passivation layer up to 30 nm thick for CIGS solar cells | |
dc.type | Journal article | |
dc.contributor.imecauthor | Kandybka, Iryna | |
dc.contributor.imecauthor | Birant, Gizem | |
dc.contributor.imecauthor | de Wild, Jessica | |
dc.contributor.imecauthor | Buldu, Dilara Gokcen | |
dc.contributor.imecauthor | Kohl, Thierry | |
dc.contributor.imecauthor | Brammertz, Guy | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Poortmans, Jef | |
dc.contributor.imecauthor | Vermang, Bart | |
dc.contributor.orcidext | Thiruvallur Eachambadi, Ragha::0000-0002-2460-8577 | |
dc.contributor.orcidext | Manca, Jean, V::0000-0002-3290-0308 | |
dc.contributor.orcidimec | Birant, Gizem::0000-0003-0496-8150 | |
dc.contributor.orcidimec | Buldu, Dilara Gokcen::0000-0003-0660-043X | |
dc.contributor.orcidimec | Kohl, Thierry::0000-0002-8232-0598 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
dc.contributor.orcidimec | de Wild, Jessica::0000-0003-2291-4674 | |
dc.contributor.orcidimec | Kohl, Thierry::4321-4321-4321-4321 | |
dc.contributor.orcidimec | Brammertz, Guy::0000-0003-1404-7339 | |
dc.contributor.orcidimec | Vermang, Bart::0000-0003-2669-2087 | |
dc.identifier.doi | 10.1088/1361-6463/abed09 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 234004 | |
dc.source.journal | JOURNAL OF PHYSICS D-APPLIED PHYSICS | |
dc.source.issue | 23 | |
dc.source.volume | 54 | |
imec.availability | Published - imec | |