dc.contributor.author | Ryu, Heon-Yul | |
dc.contributor.author | Teugels, Lieve | |
dc.contributor.author | Devriendt, Katia | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | Kim, Tae-Gon | |
dc.contributor.author | Park, Jin-Goo | |
dc.date.accessioned | 2022-03-02T13:22:26Z | |
dc.date.available | 2022-03-02T13:22:26Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2162-8769 | |
dc.identifier.other | WOS:000698809800001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39229 | |
dc.source | WOS | |
dc.title | Effects of H2O2 and pH on the Chemical Mechanical Planarization of Molybdenum | |
dc.type | Journal article | |
dc.contributor.imecauthor | Teugels, Lieve | |
dc.contributor.imecauthor | Devriendt, Katia | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
dc.identifier.doi | 10.1149/2162-8777/ac26d3 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 094001 | |
dc.source.journal | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | |
dc.source.issue | 9 | |
dc.source.volume | 10 | |
imec.availability | Published - imec | |