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The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition
dc.contributor.author | Brady-Boyd, A. | |
dc.contributor.author | O'Connor, R. | |
dc.contributor.author | Armini, S. | |
dc.contributor.author | Selvaraju, V | |
dc.contributor.author | Pasquali, M. | |
dc.contributor.author | Hughes, G. | |
dc.contributor.author | Bogan, J. | |
dc.date.accessioned | 2022-04-28T02:12:48Z | |
dc.date.available | 2022-04-28T02:12:48Z | |
dc.date.issued | 2022-JUN 1 | |
dc.identifier.issn | 0169-4332 | |
dc.identifier.other | WOS:000778689100003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39693 | |
dc.source | WOS | |
dc.title | The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition | |
dc.type | Journal article | |
dc.contributor.imecauthor | Brady-Boyd, A. | |
dc.contributor.imecauthor | Armini, S. | |
dc.contributor.imecauthor | Pasquali, M. | |
dc.identifier.doi | 10.1016/j.apsusc.2022.152679 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.journal | APPLIED SURFACE SCIENCE | |
dc.source.volume | 586 | |
imec.availability | Under review |
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