dc.contributor.author | Vega Gonzalez, Victor | |
dc.contributor.author | Montero Alvarez, Daniel | |
dc.contributor.author | Versluijs, Janko | |
dc.contributor.author | Varela Pedreira, Olalla | |
dc.contributor.author | Jourdan, Nicolas | |
dc.contributor.author | Puliyalil, Harinarayanan | |
dc.contributor.author | Chehab, Bilal | |
dc.contributor.author | Peissker, Tobias | |
dc.contributor.author | Haider, Ali | |
dc.contributor.author | Batuk, Dmitry | |
dc.contributor.author | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.author | Geypen, Jef | |
dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Bazzazian, Nina | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | van der Veen, Marleen | |
dc.contributor.author | El-Mekki, Zaid | |
dc.contributor.author | Webers, Tomas | |
dc.contributor.author | Vats, H. | |
dc.contributor.author | Rynders, Luc | |
dc.contributor.author | Cupak, Miroslav | |
dc.contributor.author | Lee, Jae Uk | |
dc.contributor.author | Drissi, Youssef | |
dc.contributor.author | Halipre, Luc | |
dc.contributor.author | Gillijns, Werner | |
dc.contributor.author | Charley, Anne-Laure | |
dc.contributor.author | Verdonck, Patrick | |
dc.contributor.author | Witters, Thomas | |
dc.contributor.author | Van Gompel, Sander | |
dc.contributor.author | Kimura, Yosuke | |
dc.contributor.author | Ciofi, Ivan | |
dc.contributor.author | De Wachter, Bart | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Grieten, Eva | |
dc.contributor.author | Ercken, Monique | |
dc.contributor.author | Kim, Ryan Ryoung han | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Leray, Philippe | |
dc.contributor.author | Jaysankar, Manoj | |
dc.contributor.author | Nagesh, Nishanth | |
dc.contributor.author | Ramakers, Leon | |
dc.contributor.author | Murdoch, Gayle | |
dc.contributor.author | Park, Seongho | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2022-05-11T09:58:50Z | |
dc.date.available | 2022-05-05T02:17:25Z | |
dc.date.available | 2022-05-11T09:58:50Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-632X | |
dc.identifier.other | WOS:000784773200049 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39735.2 | |
dc.source | WOS | |
dc.title | Process Integration of High Aspect Ratio Vias with a Comparison between Co and Ru Metallizations | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vega Gonzalez, Victor | |
dc.contributor.imecauthor | Montero Alvarez, Daniel | |
dc.contributor.imecauthor | Versluijs, Janko | |
dc.contributor.imecauthor | Varela Pedreira, Olalla | |
dc.contributor.imecauthor | Jourdan, Nicolas | |
dc.contributor.imecauthor | Puliyalil, Harinarayanan | |
dc.contributor.imecauthor | Chehab, Bilal | |
dc.contributor.imecauthor | Batuk, Dmitry | |
dc.contributor.imecauthor | Martinez Alanis, Gerardo Tadeo | |
dc.contributor.imecauthor | Geypen, Jef | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Bazzazian, Nina | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.imecauthor | El-Mekki, Zaid | |
dc.contributor.imecauthor | Webers, Tomas | |
dc.contributor.imecauthor | Vats, H. | |
dc.contributor.imecauthor | Rynders, Luc | |
dc.contributor.imecauthor | Cupak, Miroslav | |
dc.contributor.imecauthor | Lee, Jae Uk | |
dc.contributor.imecauthor | Drissi, Youssef | |
dc.contributor.imecauthor | Halipre, Luc | |
dc.contributor.imecauthor | Gillijns, Werner | |
dc.contributor.imecauthor | Charley, Anne-Laure | |
dc.contributor.imecauthor | Verdonck, Patrick | |
dc.contributor.imecauthor | Witters, Thomas | |
dc.contributor.imecauthor | Van Gompel, Sander | |
dc.contributor.imecauthor | Kimura, Yosuke | |
dc.contributor.imecauthor | Ciofi, Ivan | |
dc.contributor.imecauthor | De Wachter, Bart | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Grieten, Eva | |
dc.contributor.imecauthor | Ercken, Monique | |
dc.contributor.imecauthor | Kim, Ryan Ryoung han | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Leray, Philippe | |
dc.contributor.imecauthor | Jaysankar, Manoj | |
dc.contributor.imecauthor | Nagesh, Nishanth | |
dc.contributor.imecauthor | Ramakers, Leon | |
dc.contributor.imecauthor | Murdoch, Gayle | |
dc.contributor.imecauthor | Park, Seongho | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Vega Gonzalez, Victor::0000-0002-4320-0585 | |
dc.contributor.orcidimec | Montero Alvarez, Daniel::0000-0001-9966-0399 | |
dc.contributor.orcidimec | Varela Pedreira, Olalla::0000-0002-2987-1972 | |
dc.contributor.orcidimec | Puliyalil, Harinarayanan::0000-0002-9749-5307 | |
dc.contributor.orcidimec | Batuk, Dmitry::0000-0002-6384-6690 | |
dc.contributor.orcidimec | Martinez Alanis, Gerardo Tadeo::0000-0001-5036-0491 | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.contributor.orcidimec | El-Mekki, Zaid::0000-0002-9851-9139 | |
dc.contributor.orcidimec | Lee, Jae Uk::0000-0002-9434-5055 | |
dc.contributor.orcidimec | Gillijns, Werner::0000-0002-2430-7360 | |
dc.contributor.orcidimec | Charley, Anne-Laure::0000-0003-4745-0167 | |
dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
dc.contributor.orcidimec | Witters, Thomas::0000-0002-8528-9469 | |
dc.contributor.orcidimec | Kimura, Yosuke::0000-0002-9098-0414 | |
dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
dc.contributor.orcidimec | Grieten, Eva::0000-0001-6328-7633 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | Leray, Philippe::0000-0002-1086-270X | |
dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
dc.identifier.doi | 10.1109/IITC51362.2021.9537535 | |
dc.identifier.eisbn | 978-1-7281-7632-1 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Interconnect Technology Conference (IITC) | |
dc.source.conferencedate | JUL 06-09, 2021 | |
dc.source.conferencelocation | Virtual | |
dc.source.journal | na | |
imec.availability | Published - imec | |