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High-energy x-ray photoelectron spectroscopy spectra of TiN measured by Cr K alpha

dc.contributor.authorHoflijk, I
dc.contributor.authorVanleenhove, A.
dc.contributor.authorZborowski, C.
dc.contributor.authorVaesen, I
dc.contributor.authorArtyushkova, K.
dc.contributor.authorConard, T.
dc.date.accessioned2022-05-23T02:19:32Z
dc.date.available2022-05-23T02:19:32Z
dc.date.issued2022-JUN
dc.identifier.issn1055-5269
dc.identifier.otherWOS:000793803100001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39883
dc.sourceWOS
dc.titleHigh-energy x-ray photoelectron spectroscopy spectra of TiN measured by Cr K alpha
dc.typeJournal article
dc.contributor.imecauthorHoflijk, I
dc.contributor.imecauthorVanleenhove, A.
dc.contributor.imecauthorZborowski, C.
dc.contributor.imecauthorVaesen, I
dc.contributor.imecauthorConard, T.
dc.identifier.doi10.1116/6.0001528
dc.source.numberofpages10
dc.source.peerreviewyes
dc.source.journalSURFACE SCIENCE SPECTRA
dc.source.issue1
dc.source.volume29
imec.availabilityUnder review


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220.500.12860/39883.22022-06-07T10:15:30Zvalidation by library/open access desk
120.500.12860/39883*2022-05-23T02:19:32Z

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