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Laser-assisted removal of particles on silicon wafers

dc.contributor.authorVereecke, Guy
dc.contributor.authorRöhr, Erika
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-14T11:53:40Z
dc.date.available2021-10-14T11:53:40Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3990
dc.sourceIIOimport
dc.titleLaser-assisted removal of particles on silicon wafers
dc.typeJournal article
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpage3837
dc.source.endpage3843
dc.source.journalJ. Appl. Phys.
dc.source.issue7
dc.source.volume85
imec.availabilityPublished - imec


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