dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Marinov, D. | |
dc.contributor.author | Goodyear, A. | |
dc.contributor.author | Wyndaele, Pieter-Jan | |
dc.contributor.author | St. J. Braithwaite, N. | |
dc.contributor.author | Kundu, S. | |
dc.contributor.author | Asselberghs, Inge | |
dc.contributor.author | Cooke, M. | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2022-09-01T13:44:22Z | |
dc.date.available | 2022-06-15T02:21:33Z | |
dc.date.available | 2022-09-01T13:44:22Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.other | WOS:000804453900001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39951.2 | |
dc.source | WOS | |
dc.title | Plasma enhanced atomic layer etching of high-k layers on WS2 | |
dc.type | Journal article | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Wyndaele, Pieter-Jan | |
dc.contributor.imecauthor | Kundu, S. | |
dc.contributor.imecauthor | Asselberghs, Inge | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Wyndaele, Pieter-Jan::0000-0003-4010-8377 | |
dc.contributor.orcidimec | Kundu, Shreya::0000-0001-8052-7774 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | de Marneffe, Jean-Francois::0000-0001-5178-6670 | |
dc.contributor.orcidimec | Asselberghs, Inge::0000-0001-8371-3222 | |
dc.date.embargo | 2023-05-26 | |
dc.identifier.doi | 10.1116/6.0001726 | |
dc.source.numberofpages | 9 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 042602 | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
dc.source.issue | 4 | |
dc.source.volume | 40 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | D. Marinov has received funding from the European Unions Horizon 2020 research and innovation program under Marie Sklodowska-Curie, Grant Agreement No. 752164. J.-F. de Marneffe received funding from the Graphene Flagship, Grant Agreement No. 952792. All authors acknowledge the support of imecs beyond CMOS program, imecs pilot line, and imecs materials and characterization (MCA) group. The authors thank Dr. Laura Nyns (imec) for the ALD of ZrO 2 and HfO 2 films and Dr. Benjamin Groven (imec) for the deposition of WS 2 films by PEALD. | |