Publication:

Plasma enhanced atomic layer etching of high-k layers on WS2

Date

2022
Journal article
https://doi.org/10.1116/6.0001726
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 2.91 MB

Author(s)

de Marneffe, Jean-Francois  
;
Marinov, D.
;
Goodyear, A.
;
Wyndaele, Pieter-Jan  
;
St. J. Braithwaite, N.
;
Kundu, S.
;
Asselberghs, Inge  
;
Cooke, M.
;
De Gendt, Stefan  

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Abstract

Description

Metrics

Downloads

1199 since deposited on 2022-06-15
166last month
13last week
Acq. date: 2025-12-13

Views

1730 since deposited on 2022-06-15
2last month
1last week
Acq. date: 2025-12-13

Citations

Metrics

Downloads

1199 since deposited on 2022-06-15
166last month
13last week
Acq. date: 2025-12-13

Views

1730 since deposited on 2022-06-15
2last month
1last week
Acq. date: 2025-12-13

Citations