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Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranes

dc.contributor.authorVerhaegen, Katarina
dc.contributor.authorBaert, Kris
dc.contributor.authorPuers, Bob
dc.contributor.authorSansen, Willy
dc.contributor.authorHermans, Lou
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-14T11:54:22Z
dc.date.available2021-10-14T11:54:22Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3997
dc.sourceIIOimport
dc.titleUse of liquid rubber in micromachining focused on flexible large-area biocompatible membranes
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorMertens, Robert
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage105
dc.source.endpage110
dc.source.journalSensors and Materials
dc.source.issue2
dc.source.volume11
imec.availabilityPublished - open access


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