Stress Relaxation in Laterally Small Strained Semiconductor Epilayers
dc.contributor.author | Van Mieghem, Piet | |
dc.contributor.author | Jain, Suresh | |
dc.contributor.author | Nijs, Johan | |
dc.contributor.author | Van Overstraeten, Roger | |
dc.date.accessioned | 2021-09-29T12:49:58Z | |
dc.date.available | 2021-09-29T12:49:58Z | |
dc.date.issued | 1994 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/399 | |
dc.source | IIOimport | |
dc.title | Stress Relaxation in Laterally Small Strained Semiconductor Epilayers | |
dc.type | Journal article | |
dc.source.peerreview | no | |
dc.source.beginpage | 666 | |
dc.source.endpage | 668 | |
dc.source.journal | J. Appl. Phys. | |
dc.source.volume | 75 | |
imec.availability | Published - imec |
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