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Surface reconstruction of hydrogen annealed (100) silicon

dc.contributor.authorBender, Hugo
dc.contributor.authorVerhaverbeke, Steven
dc.contributor.authorCaymax, Matty
dc.contributor.authorVatel, Oliver
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T12:39:48Z
dc.date.available2021-09-29T12:39:48Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39
dc.sourceIIOimport
dc.titleSurface reconstruction of hydrogen annealed (100) silicon
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.source.peerreviewno
dc.source.beginpage1207
dc.source.endpage1209
dc.source.journalJournal of Applied Physics
dc.source.issue2
dc.source.volume75
imec.availabilityPublished - imec


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