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Buried Power Rail Metal exploration towards the 1 nm Node

dc.contributor.authorGupta, Anshul
dc.contributor.authorRadisic, Dunja
dc.contributor.authorMaes, J.W.
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorMertens, Hans
dc.contributor.authorBandyopadhyay, Sudip
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorPacco, Antoine
dc.contributor.authorHeylen, Nancy
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorDevriendt, Katia
dc.contributor.authorZhu, C.
dc.contributor.authorDatta, S.
dc.contributor.authorSebaai, Farid
dc.contributor.authorWang, S.
dc.contributor.authorMousa, M.
dc.contributor.authorLee, J.
dc.contributor.authorGeypen, Jef
dc.contributor.authorDe Wachter, Bart
dc.contributor.authorChehab, Bilal
dc.contributor.authorSalahuddin, Shairfe Muhammad
dc.contributor.authorMurdoch, Gayle
dc.contributor.authorBiesemans, Serge
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2022-08-25T14:55:09Z
dc.date.available2022-07-09T02:27:20Z
dc.date.available2022-08-25T14:55:09Z
dc.date.issued2021
dc.identifier.issn2380-9248
dc.identifier.otherWOS:000812325400185
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40073.4
dc.sourceWOS
dc.titleBuried Power Rail Metal exploration towards the 1 nm Node
dc.typeProceedings paper
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorRadisic, Dunja
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorBandyopadhyay, Sudip
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorDe Wachter, Bart
dc.contributor.imecauthorChehab, Bilal
dc.contributor.imecauthorSalahuddin, Shairfe Muhammad
dc.contributor.imecauthorMurdoch, Gayle
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecVarela Pedreira, Olalla::0000-0002-2987-1972
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecBandyopadhyay, Sudip::0000-0002-9856-7392
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecSalahuddin, Shairfe Muhammad::0000-0002-6483-8430
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.identifier.doi10.1109/IEDM19574.2021.9720684
dc.identifier.eisbn978-1-6654-2572-8
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.conferenceIEEE International Electron Devices Meeting (IEDM)
dc.source.conferencedateDEC 11-16, 2021
dc.source.conferencelocationSan Francisco
dc.source.journalna
imec.availabilityPublished - imec


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420.500.12860/40073.4*2022-08-25T14:34:35Zvalidation by library/open access desk
120.500.12860/400732022-07-09T02:27:20Z

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