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Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices
dc.contributor.author | Arimura, H. | |
dc.contributor.author | Ragnarsson, L-A | |
dc.contributor.author | Oniki, Y. | |
dc.contributor.author | Franco, J. | |
dc.contributor.author | Vandooren, A. | |
dc.contributor.author | Brus, S. | |
dc.contributor.author | Leonhardt, A. | |
dc.contributor.author | Sippola, P. | |
dc.contributor.author | Ivanova, T. | |
dc.contributor.author | Verni, G. Alessio | |
dc.contributor.author | Chang, R-J | |
dc.contributor.author | Xie, Q. | |
dc.contributor.author | Givens, M. | |
dc.contributor.author | Mitard, J. | |
dc.contributor.author | Biesemans, S. | |
dc.contributor.author | Litta, E. Dentoni | |
dc.contributor.author | Horiguchi, N. | |
dc.date.accessioned | 2022-07-09T02:27:24Z | |
dc.date.available | 2022-07-09T02:27:24Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000812325400033 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40080 | |
dc.source | WOS | |
dc.title | Dipole-First Gate Stack as a Scalable and Thermal Budget Flexible Multi-Vt Solution for Nanosheet/CFET Devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Arimura, H. | |
dc.contributor.imecauthor | Ragnarsson, L-A | |
dc.contributor.imecauthor | Oniki, Y. | |
dc.contributor.imecauthor | Franco, J. | |
dc.contributor.imecauthor | Vandooren, A. | |
dc.contributor.imecauthor | Brus, S. | |
dc.contributor.imecauthor | Mitard, J. | |
dc.contributor.imecauthor | Biesemans, S. | |
dc.contributor.imecauthor | Litta, E. Dentoni | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.identifier.doi | 10.1109/IEDM19574.2021.9720527 | |
dc.identifier.eisbn | 978-1-6654-2572-8 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 11-16, 2021 | |
dc.source.conferencelocation | San Francisco | |
imec.availability | Under review |
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