dc.contributor.author | Franco, Jacopo | |
dc.contributor.author | Arimura, Hiroaki | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Wu, Zhicheng | |
dc.contributor.author | Vandooren, Anne | |
dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Dentoni Litta, Eugenio | |
dc.contributor.author | Horiguchi, Naoto | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Linten, Dimitri | |
dc.contributor.author | Afanasiev, Valeri | |
dc.contributor.author | Grasser, T. | |
dc.contributor.author | Kaczer, Ben | |
dc.date.accessioned | 2022-08-25T15:55:52Z | |
dc.date.available | 2022-07-09T02:27:25Z | |
dc.date.available | 2022-08-25T15:55:52Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000812325400158 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40082.2 | |
dc.source | WOS | |
dc.title | Low-temperature atomic and molecular hydrogen anneals for enhanced chemical SiO2 IL quality in low thermal budget RMG stacks | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Franco, Jacopo | |
dc.contributor.imecauthor | Arimura, Hiroaki | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Wu, Zhicheng | |
dc.contributor.imecauthor | Vandooren, Anne | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Dentoni Litta, Eugenio | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Linten, Dimitri | |
dc.contributor.imecauthor | Afanasiev, Valeri | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
dc.contributor.orcidimec | Vandooren, Anne::0000-0002-2412-0176 | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Dentoni Litta, Eugenio::0000-0003-0333-376X | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.identifier.doi | 10.1109/IEDM19574.2021.9720657 | |
dc.identifier.eisbn | 978-1-6654-2572-8 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 11-16, 2021 | |
dc.source.conferencelocation | San Francisco | |
dc.source.journal | na | |
imec.availability | Published - imec | |