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Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond
dc.contributor.author | Ritzenthaler, R. | |
dc.contributor.author | Mertens, H. | |
dc.contributor.author | Enema, G. | |
dc.contributor.author | Simoen, E. | |
dc.contributor.author | Bury, E. | |
dc.contributor.author | Eybenl, P. | |
dc.contributor.author | Bufler, F. M. | |
dc.contributor.author | Oniki, Y. | |
dc.contributor.author | Briggs, B. | |
dc.contributor.author | Chan, B. T. | |
dc.contributor.author | Hikavyy, A. | |
dc.contributor.author | Mannaert, G. | |
dc.contributor.author | Parvais, B. | |
dc.contributor.author | Chasin, A. | |
dc.contributor.author | Mitard, J. | |
dc.contributor.author | Litta, E. Dentoni | |
dc.contributor.author | Samavedam, S. | |
dc.contributor.author | Horiguchi, N. | |
dc.date.accessioned | 2022-07-09T02:27:44Z | |
dc.date.available | 2022-07-09T02:27:44Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2380-9248 | |
dc.identifier.other | WOS:000812325400030 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40089 | |
dc.source | WOS | |
dc.title | Comparison of Electrical Performance of Co-Integrated Forksheets and Nanosheets Transistors for the 2nm Technological Node and Beyond | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ritzenthaler, R. | |
dc.contributor.imecauthor | Mertens, H. | |
dc.contributor.imecauthor | Enema, G. | |
dc.contributor.imecauthor | Simoen, E. | |
dc.contributor.imecauthor | Bury, E. | |
dc.contributor.imecauthor | Eybenl, P. | |
dc.contributor.imecauthor | Bufler, F. M. | |
dc.contributor.imecauthor | Oniki, Y. | |
dc.contributor.imecauthor | Briggs, B. | |
dc.contributor.imecauthor | Chan, B. T. | |
dc.contributor.imecauthor | Hikavyy, A. | |
dc.contributor.imecauthor | Mannaert, G. | |
dc.contributor.imecauthor | Parvais, B. | |
dc.contributor.imecauthor | Chasin, A. | |
dc.contributor.imecauthor | Mitard, J. | |
dc.contributor.imecauthor | Litta, E. Dentoni | |
dc.contributor.imecauthor | Samavedam, S. | |
dc.contributor.imecauthor | Horiguchi, N. | |
dc.identifier.doi | 10.1109/IEDM19574.2021.9720524 | |
dc.identifier.eisbn | 978-1-6654-2572-8 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.conference | IEEE International Electron Devices Meeting (IEDM) | |
dc.source.conferencedate | DEC 11-16, 2021 | |
dc.source.conferencelocation | San Francisco | |
imec.availability | Under review |
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