dc.contributor.author | Claessens, Niels | |
dc.contributor.author | Couture, Pierre | |
dc.contributor.author | England, Jonathan | |
dc.contributor.author | Vos, Rita | |
dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Vantomme, Andre | |
dc.contributor.author | Meersschaut, Johan | |
dc.date.accessioned | 2022-08-29T10:20:40Z | |
dc.date.available | 2022-07-10T02:26:51Z | |
dc.date.available | 2022-07-23T10:58:50Z | |
dc.date.available | 2022-08-29T10:20:40Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2468-0230 | |
dc.identifier.other | WOS:000816918800003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40105.3 | |
dc.source | WOS | |
dc.title | Ensemble RBS: Probing the compositional profile of 3D microscale structures | |
dc.type | Journal article | |
dc.contributor.imecauthor | Claessens, Niels | |
dc.contributor.imecauthor | Vos, Rita | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.orcidimec | Claessens, Niels::0000-0002-8863-9532 | |
dc.contributor.orcidimec | Vos, Rita::0000-0003-2610-3406 | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.1016/j.surfin.2022.102101 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.journal | SURFACES AND INTERFACES | |
dc.source.issue | August | |
dc.source.volume | 32 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This work was supported by the European Union's Horizon 2020 research and innovation programme [grant number 824096 - RADIATE] and by the Research Foundation - Flanders (FWO) [grant number 1S45421N]. | |