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Ensemble RBS: Probing the compositional profile of 3D microscale structures
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Authors
Claessens, Niels
;
Couture, Pierre
;
England, Jonathan
;
Vos, Rita
;
Hantschel, Thomas
;
Vandervorst, Wilfried
;
Vantomme, Andre
;
Meersschaut, Johan
DOI
10.1016/j.surfin.2022.102101
ISSN
2468-0230
Issue
August
Journal
SURFACES AND INTERFACES
Volume
32
Title
Ensemble RBS: Probing the compositional profile of 3D microscale structures
Publication type
Journal article
Embargo date
9999-12-31
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Date
Summary
3
20.500.12860/40105.3
*
2022-08-29T10:18:55Z
validation by library/open access desk
2
20.500.12860/40105.2
2022-07-22T21:53:19Z
validation by imec author
1
20.500.12860/40105
2022-07-10T02:26:51Z
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