Browsing by author "Meersschaut, Johan"
Now showing items 1-20 of 181
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A new method for the determination of surface chemistry of structured surfaces at the microscale using RBS in a tomographic mode
Claessens, Niels; Vandervorst, Wilfried; Meersschaut, Johan (2020) -
A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography
Dialameh, Masoud; Scheerder, Jeroen; Morris, Richard; Meersschaut, Johan; Richard, Olivier; Vandervorst, Wilfried; van der Heide, Paul; Fleischmann, Claudia (2021) -
A study of blister formation in ALD Al2O3 grown on silicon
Vermang, Bart; Goverde, Hans; Simons, Veerle; De Wolf, Ingrid; Meersschaut, Johan; Tanaku, Shuji; John, Joachim; Poortmans, Jef; Mertens, Robert (2012) -
A Study of SiCN Wafer-to-Wafer Bonding and Impact of Wafer Warpage
Iacovo, Serena; D'have, Koen; Okudur, Oguzhan Orkut; De Vos, Joeri; Uhrmann, Thomas; Plach, Thomas; Conard, Thierry; Meersschaut, Johan; Bex, Pieter; Brems, Steven; Phommahaxay, Alain; Gonzalez, Mario; Witters, Liesbeth; Beyer, Gerald; Beyne, Eric (2023) -
Advanced mass discrimination in recoil spectrometry
Laricchiuta, Grazia; Vandervorst, Wilfried; Meersschaut, Johan (2016) -
Advanced metrology for beyond silicon semiconductor device structures
Schulze, Andreas; Loo, Roger; Meersschaut, Johan; van Dorp, Dennis; Gachet, David; Berney, Jean; Vandervorst, Wilfried; Caymax, Matty (2015) -
Advances in metrology for complex epitaxial systems embedded in small volums
Vandervorst, Wilfried; Kumar, Arul; Meersschaut, Johan; Franquet, Alexis; Douhard, Bastien; Delmotte, Joris; Conard, Thierry; Nuytten, Thomas; Hantschel, Thomas; Loo, Roger (2015-05) -
Al2O3/InGaAs metal-oxide-semiconductor interface properties: impact of Gd2O3 and Sc2O3 interfacial layers by atomic layer deposition
Ameen, Mahmoud; Nyns, Laura; Sioncke, Sonja; Lin, Dennis; Ivanov, Tsvetan; Conard, Thierry; Meersschaut, Johan; Feteha, M. Y.; Van Elshocht, Sven; Delabie, Annelies (2014) -
ALD barrier deposition on porous low-k dielectric materials for interconnects
Van Elshocht, Sven; Delabie, Annelies; Dewilde, Sven; Meersschaut, Johan; Swerts, Johan; Tielens, Hilde; Verdonck, Patrick; Witters, Thomas; Vancoille, Eric (2011-10) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; Van Bael, Marlies; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2009) -
Area-Selective Atomic Layer Deposition of Ru Using Carbonyl-Based Precursor and Oxygen Co-Reactant: Understanding Defect Formation Mechanisms
Lodha, Jayant Kumar; Meersschaut, Johan; Pasquali, Mattia; Billington, Hans; De Gendt, Stefan; Armini, Silvia (2024) -
Atomic layer deposition of 2D transition metal dichalogenides
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015-10) -
Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering
Ameen, Mahmoud; Nyns, Laura; Lin, Dennis; Ivanov, Tsvetan; Conard, Thierry; Meersschaut, Johan; Sioncke, Sonja; Feteha, Mohamed; Van Elshocht, Sven; Delabie, Annelies (2014) -
Atomic layer deposition of nitrogen doped Al-phosphate coatings for Li-ion battery applications
Henderick, Lowie; Hamed, Hamid; Matteraer, Felix; Minjauw, Matthias; Meersschaut, Johan; Dendooven, Jolien; Safari, Momo; Vereecken, Philippe; Detavernier, Christophe (2020) -
Atomic layer deposition of Ru thin films using the zero-valence precursor EBECH Ru
Adelmann, Christoph; Popovici, Mihaela Ioana; Groven, Benjamin; Moens, Kristof; Meersschaut, Johan; Franquet, Alexis; Swerts, Johan; Delabie, Annelies; Van Elshocht, Sven (2014) -
Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
Popovici, Mihaela Ioana; Groven, Benjamin; Marcoen, Kristof; Phung, Quan; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; Van den Berg, Jaap; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Gosia; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph (2017) -
Atomic layer deposition of TiO2 on surface modified nanoporous low-k films
Levrau, Elisabeth; Devloo-Casier, Kilain; Dendooven, Jolien; Ludwig, Karl; Verdonck, Patrick; Meersschaut, Johan; Baklanov, Mikhaïl; Detavernier, Christophe (2013) -
BEOLC compatiblehigh tunnel magneto resistance perpendicula magnetic tunnel junctions using a sacrificial Mg layer as CoFeB free layer cap
Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Tomczak, Yoann; Sankaran, Kiroubanand; Pourtois, Geoffrey; Kim, Woojin; Meersschaut, Johan; Souriau, Laurent; Radisic, Dunja; Van Elshocht, Sven; Kar, Gouri Sankar; Furnemont, Arnaud (2015) -
Calibration of PIXE yields using binary thin films on Si
Meersschaut, Johan; Carbonel, Jacob; Popovici, Mihaela Ioana; Zhao, Qiang; Vantomme, Andre; Vandervorst, Wilfried (2014)