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Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering

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1954 since deposited on 2021-10-22
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Acq. date: 2026-10-05

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1954 since deposited on 2021-10-22
2last month
2last week
Acq. date: 2026-10-05

Citations