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Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering
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Authors
Ameen, Mahmoud
;
Nyns, Laura
;
Lin, Dennis
;
Ivanov, Tsvetan
;
Conard, Thierry
;
Meersschaut, Johan
;
Sioncke, Sonja
;
Feteha, Mohamed
;
Van Elshocht, Sven
;
Delabie, Annelies
Conference
12th International Baltic Conference on Atomic Layer Deposition
Title
Atomic layer deposition of Gd2O3 and Sc2O3 on In0.53Ga0.47As: Interfacial layer engineering
Publication type
Meeting abstract
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