A study of blister formation in ALD Al2O3 grown on silicon

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Authors
Vermang, Bart; Goverde, Hans; Simons, Veerle; De Wolf, Ingrid; Meersschaut, Johan; Tanaku, Shuji; John, Joachim; Poortmans, Jef; Mertens, Robert
Conference
38th IEEE Photovoltaic Specialists Conference - PVSC
Title
A study of blister formation in ALD Al2O3 grown on silicon
Publication type
Proceedings paper
Embargo date
9999-12-31
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