Publication:
A study of blister formation in ALD Al2O3 grown on silicon
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1925 since deposited on 2021-10-20
3last month
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Acq. date: 2026-02-28
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Statistics
Views
1925 since deposited on 2021-10-20
3last month
1last week
Acq. date: 2026-02-28
Citations