Alternative high-k dielectrics for semiconductor applications

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Authors
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; Van Bael, Marlies; Blomberg, T.; Pierreux, Dieter; Swerts, Johan; Maes, Jan; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge
ISSN
1071-1023
Issue
1
Journal
Journal of Vacuum Science and Technology B
Volume
27
Title
Alternative high-k dielectrics for semiconductor applications
Publication type
Journal article
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