Publication:

Alternative high-k dielectrics for semiconductor applications

Date

2009
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorClima, Sergiu
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorConard, Thierry
dc.contributor.authorDelabie, Annelies
dc.contributor.authorFranquet, Alexis
dc.contributor.authorLehnen, Peer
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorMenou, Nicolas
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorRichard, Olivier
dc.contributor.authorSchram, Tom
dc.contributor.authorWang, Xin Peng
dc.contributor.authorHardy, An
dc.contributor.authorDewulf, Daan
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorBlomberg, T.
dc.contributor.authorPierreux, Dieter
dc.contributor.authorSwerts, Johan
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorClima, Sergiu
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecClima, Sergiu::0000-0002-4044-9975
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-18T04:07:00Z
dc.date.available2021-10-18T04:07:00Z
dc.date.issued2009
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16380
dc.source.beginpage209
dc.source.endpage213
dc.source.issue1
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.volume27
dc.title

Alternative high-k dielectrics for semiconductor applications

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles