Publication:

Alternative high-k dielectrics for semiconductor applications

Date

2009
Journal article
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Author(s)

Van Elshocht, Sven  
;
Adelmann, Christoph  
;
Clima, Sergiu  
;
Pourtois, Geoffrey  
;
Conard, Thierry  
;
Delabie, Annelies  
;
Franquet, Alexis  
;
Lehnen, Peer
;
Meersschaut, Johan  
;
Menou, Nicolas
;
Popovici, Mihaela Ioana  
;
Richard, Olivier  
;
Schram, Tom  
;
Wang, Xin Peng
;
Hardy, An  
;
Dewulf, Daan
;
Van Bael, Marlies  
;
Blomberg, T.
;
Pierreux, Dieter  
;
Swerts, Johan  
;
Maes, Jan  
;
Wouters, Dirk
;
De Gendt, Stefan  
;
Kittl, Jorge

Journal

Journal of Vacuum Science and Technology B

Abstract

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