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Alternative high-k dielectrics for semiconductor applications
Publication:
Alternative high-k dielectrics for semiconductor applications
Date
2009
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Elshocht, Sven
;
Adelmann, Christoph
;
Clima, Sergiu
;
Pourtois, Geoffrey
;
Conard, Thierry
;
Delabie, Annelies
;
Franquet, Alexis
;
Lehnen, Peer
;
Meersschaut, Johan
;
Menou, Nicolas
;
Popovici, Mihaela Ioana
;
Richard, Olivier
;
Schram, Tom
;
Wang, Xin Peng
;
Hardy, An
;
Dewulf, Daan
;
Van Bael, Marlies
;
Blomberg, T.
;
Pierreux, Dieter
;
Swerts, Johan
;
Maes, Jan
;
Wouters, Dirk
;
De Gendt, Stefan
;
Kittl, Jorge
Journal
Journal of Vacuum Science and Technology B
Abstract
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1998
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1998
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations