Publication:
Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
Date
Loading...
Journal
Abstract
Description
Metrics
Views
2000 since deposited on 2021-10-24
3last month
1last week
Acq. date: 2026-01-11
Citations
Metrics
Views
2000 since deposited on 2021-10-24
3last month
1last week
Acq. date: 2026-01-11
Citations