Publication:
Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
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1995 since deposited on 2021-10-24
461item.page.metrics.field.last-week
Acq. date: 2025-10-25
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Metrics
Views
1995 since deposited on 2021-10-24
461item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations