Advances in metrology for complex epitaxial systems embedded in small volums

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Authors
Vandervorst, Wilfried; Kumar, Arul; Meersschaut, Johan; Franquet, Alexis; Douhard, Bastien; Delmotte, Joris; Conard, Thierry; Nuytten, Thomas; Hantschel, Thomas; Loo, Roger
Conference
9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9
Title
Advances in metrology for complex epitaxial systems embedded in small volums
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