Publication:

Advances in metrology for complex epitaxial systems embedded in small volums

Date

2015-05
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorKumar, Arul
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorDelmotte, Joris
dc.contributor.authorConard, Thierry
dc.contributor.authorNuytten, Thomas
dc.contributor.authorHantschel, Thomas
dc.contributor.authorLoo, Roger
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-23T00:22:45Z
dc.date.available2021-10-23T00:22:45Z
dc.date.issued2015-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26100
dc.source.beginpage133
dc.source.conference9th International Conference on Silicon Epitaxy and Heterostructures - ICSI9
dc.source.conferencedate18/05/2015
dc.source.conferencelocationMontreal Canada
dc.source.endpage134
dc.title

Advances in metrology for complex epitaxial systems embedded in small volums

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions