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A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes
dc.contributor.author | Nibhanupudi, S. S. Teja | |
dc.contributor.author | Prasad, Divya | |
dc.contributor.author | Das, Shidhartha | |
dc.contributor.author | Zografos, Odysseas | |
dc.contributor.author | Robinson, Alex | |
dc.contributor.author | Gupta, Anshul | |
dc.contributor.author | Spessot, Alessio | |
dc.contributor.author | Debacker, Peter | |
dc.contributor.author | Verkest, Diederik | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Hellings, Geert | |
dc.contributor.author | Myers, James | |
dc.contributor.author | Cline, Brian | |
dc.contributor.author | Kulkarni, Jaydeep P. | |
dc.date.accessioned | 2022-09-06T12:48:09Z | |
dc.date.available | 2022-07-22T02:26:53Z | |
dc.date.available | 2022-09-06T12:48:09Z | |
dc.date.issued | 2022-07-07 | |
dc.identifier.issn | 0018-9383 | |
dc.identifier.other | WOS:000824756400001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40160.2 | |
dc.source | WOS | |
dc.title | A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes | |
dc.type | Journal article | |
dc.type | Journal article (pre-print) | |
dc.contributor.imecauthor | Zografos, Odysseas | |
dc.contributor.imecauthor | Gupta, Anshul | |
dc.contributor.imecauthor | Spessot, Alessio | |
dc.contributor.imecauthor | Debacker, Peter | |
dc.contributor.imecauthor | Verkest, Diederik | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Hellings, Geert | |
dc.contributor.orcidimec | Zografos, Odysseas::0000-0002-9998-8009 | |
dc.contributor.orcidimec | Debacker, Peter::0000-0003-3825-5554 | |
dc.contributor.orcidimec | Verkest, Diederik::0000-0001-6567-2746 | |
dc.contributor.orcidimec | Hellings, Geert::0000-0002-5376-2119 | |
dc.identifier.doi | 10.1109/TED.2022.3186657 | |
dc.source.numberofpages | 7 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Electrical & electronic engineering | |
dc.source.beginpage | 4453 | |
dc.source.endpage | 4459 | |
dc.source.journal | IEEE TRANSACTIONS ON ELECTRON DEVICES | |
dc.source.issue | 8 | |
dc.source.volume | 69 | |
imec.availability | Under review |