Publication:

A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

Date

2022-07-07
Journal article
https://doi.org/10.1109/TED.2022.3186657
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Published version 3.22 MB
Accepted version 4.74 MB

Author(s)

Nibhanupudi, S. S. Teja
;
Prasad, Divya
;
Das, Shidhartha
;
Zografos, Odysseas  
;
Robinson, Alex
;
Gupta, Anshul  
;
Spessot, Alessio  
;
Debacker, Peter  
;
Verkest, Diederik  
;
Ryckaert, Julien  
;
Hellings, Geert  
;
Myers, James
;
Cline, Brian
;
Kulkarni, Jaydeep P.

Journal

IEEE TRANSACTIONS ON ELECTRON DEVICES

Abstract

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1010 since deposited on 2022-07-22
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1569 since deposited on 2022-07-22
2last month
1last week
Acq. date: 2026-02-05

Citations