Publication:

A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

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1624 since deposited on 2022-07-22
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Acq. date: 2026-10-06

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1585 since deposited on 2022-07-22
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Downloads

1624 since deposited on 2022-07-22
140last month
47last week
Acq. date: 2026-10-06

Views

1585 since deposited on 2022-07-22
5last month
3last week
Acq. date: 2026-10-05

Citations