Publication:

A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

Date

2022-07-07
Journal article
https://doi.org/10.1109/TED.2022.3186657
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dc.contributor.authorNibhanupudi, S. S. Teja
dc.contributor.authorPrasad, Divya
dc.contributor.authorDas, Shidhartha
dc.contributor.authorZografos, Odysseas
dc.contributor.authorRobinson, Alex
dc.contributor.authorGupta, Anshul
dc.contributor.authorSpessot, Alessio
dc.contributor.authorDebacker, Peter
dc.contributor.authorVerkest, Diederik
dc.contributor.authorRyckaert, Julien
dc.contributor.authorHellings, Geert
dc.contributor.authorMyers, James
dc.contributor.authorCline, Brian
dc.contributor.authorKulkarni, Jaydeep P.
dc.contributor.imecauthorZografos, Odysseas
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorHellings, Geert
dc.contributor.orcidimecZografos, Odysseas::0000-0002-9998-8009
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.date.accessioned2022-12-21T10:30:29Z
dc.date.available2022-07-22T02:26:53Z
dc.date.available2022-09-06T12:48:09Z
dc.date.available2022-12-21T10:30:29Z
dc.date.embargo2022-07-31
dc.date.issued2022-07-07
dc.identifier.doi10.1109/TED.2022.3186657
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40160
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage4453
dc.source.endpage4459
dc.source.issue8
dc.source.journalIEEE TRANSACTIONS ON ELECTRON DEVICES
dc.source.numberofpages7
dc.source.volume69
dc.subject.disciplineElectrical & electronic engineering
dc.title

A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

dc.typeJournal article
dspace.entity.typePublication
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