A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

Kulkarni, Jaydeep P.

doi:10.1109/TED.2022.3186657

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Nibhanupudi, S. S. Teja

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IEEE TRANSACTIONS ON ELECTRON DEVICES

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694 since deposited on 2022-07-22

Acq. date: 2025-10-27

1559 since deposited on 2022-07-22

Acq. date: 2025-10-27

A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

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