Publication:

A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes

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1464 since deposited on 2022-07-22
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Acq. date: 2026-08-31

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Downloads

1464 since deposited on 2022-07-22
116last month
17last week
Acq. date: 2026-08-31

Views

1580 since deposited on 2022-07-22
4last month
2last week
Acq. date: 2026-08-31

Citations