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Characterization and integration of low permittivity dielectrics

dc.contributor.authorWaeterloos, Joost
dc.date.accessioned2021-10-14T11:56:24Z
dc.date.available2021-10-14T11:56:24Z
dc.date.issued1999-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4016
dc.sourceIIOimport
dc.titleCharacterization and integration of low permittivity dielectrics
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis Advisor : Prof. Dr. Ir. G. Declerck


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