Evaluation of Nanosheet and Forksheet Width Modulation for Digital IC Design in the Sub-3 nm Era

Abstract

In this article, we provide a comprehensive evaluation of width modulation capabilities of both nanosheet (NS) and forksheet (FS) devices, going from device level to a block level implementation. The main innovation introduced by the FS consists of a dielectric wall added between the p- and nMOS transistors. Leveraging this feature, FS shows approximately the same current behavior as NS, considered a state-of-the-art reference, but reduced parasitic capacitance thanks to its fewer but wider stacked sheets. At block level, an area reduction up to 12% is observed with FS, alongside a 13% power reduction and 10% frequency increase. Following the device comparison, the potential of sheet width modulation as additional power, performance, and area (PPA) optimization technique during synthesis and place and route (PNR) is investigated. A description of the specific steps required to enable this knob in a conventional electronic design automation (EDA) framework is provided. As demonstrated by the obtained experimental results, the same frequency of the single-width implementation can be achieved using mixed libraries with lower power consumption (13% and 16% for NS and FS, respectively), leading to improved energy efficiency. Furthermore, it is shown how designs implemented using FS benefit more from this type of optimization than the ones using NS, with a 12%-15% energy reduction compared to the 8.5%-14% obtained with NS.