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Off-axis Raman spectroscopy for nanoscale stress metrology
dc.contributor.author | Khan, Zoheb | |
dc.contributor.author | Nuytten, Thomas | |
dc.contributor.author | Favia, Paola | |
dc.contributor.author | Fleischmann, Claudia | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2022-08-05T02:35:56Z | |
dc.date.available | 2022-08-05T02:35:56Z | |
dc.date.issued | 2022-JUL 21 | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.other | WOS:000829242700002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40213 | |
dc.source | WOS | |
dc.title | Off-axis Raman spectroscopy for nanoscale stress metrology | |
dc.type | Journal article | |
dc.contributor.imecauthor | Khan, Zoheb | |
dc.contributor.imecauthor | Nuytten, Thomas | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.imecauthor | Fleischmann, Claudia | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Nuytten, Thomas::0000-0002-5921-6928 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.identifier.doi | 10.1063/5.0100602 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF APPLIED PHYSICS | |
dc.source.issue | 3 | |
dc.source.volume | 132 | |
imec.availability | Under review |
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