| dc.contributor.author | Brady-Boyd, Anita | |
| dc.contributor.author | Chery, Emmanuel | |
| dc.contributor.author | Armini, Silvia | |
| dc.date.accessioned | 2022-11-10T09:28:36Z | |
| dc.date.available | 2022-09-08T02:38:35Z | |
| dc.date.available | 2022-11-10T09:28:36Z | |
| dc.date.issued | 2022 | |
| dc.identifier.issn | 1948-7185 | |
| dc.identifier.other | WOS:000848554500001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40364.2 | |
| dc.source | WOS | |
| dc.title | Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging | |
| dc.type | Journal article | |
| dc.contributor.imecauthor | Brady-Boyd, Anita | |
| dc.contributor.imecauthor | Chery, Emmanuel | |
| dc.contributor.imecauthor | Armini, Silvia | |
| dc.contributor.orcidimec | Brady-Boyd, Anita::0000-0002-9257-6837 | |
| dc.contributor.orcidimec | Chery, Emmanuel::0000-0002-2526-3873 | |
| dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
| dc.identifier.doi | 10.1021/acs.jpclett.2c02080 | |
| dc.source.numberofpages | 4 | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | 8130 | |
| dc.source.endpage | 8133 | |
| dc.source.journal | JOURNAL OF PHYSICAL CHEMISTRY LETTERS | |
| dc.identifier.pmid | MEDLINE:36000826 | |
| dc.source.issue | 34 | |
| dc.source.volume | 13 | |
| imec.availability | Published - open access | |
| dc.description.wosFundingText | This project has received funding from the European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie g r a n t agreement No. 888163. The authors would like to thank Dr. E. Vancoille and Dr. O. Richard for the FIB analysis. Our sincere thanks and appreciation go to JSR Corporation and JSR Micro N.V. for providing the photosensitive polymer used in this study. | |
